Inverted planar avalanche photodiode

作者: Michael T. Morse , Alexandre Pauchard

DOI:

关键词: Avalanche photodiodeOptoelectronicsMaterials scienceElectric fieldLayer (electronics)Charge carrierAbsorption (electromagnetic radiation)PhotodetectorPlanarDopingOptics

摘要: An avalanche photodetector is disclosed. apparatus according to aspects of the present invention includes a semiconductor substrate layer including first type material. The also multiplication material disposed proximate layer. an absorption having second such that between and optically coupled receive absorb optical beam. n+ doped region defined at surface opposite A high electric field generated in multiply charge carriers photo-generated response beam received

参考文章(62)
Michael J. Robertson, Julie J. Rimington, Paul M. Rodgers, Guard ring structure with graded be implantation ,(1990)
Mark A. Itzler, Nicholos J. Codd, Chen Show Wang, Suzanne McCoy, Avalanche photodiode for high-speed applications ,(2000)
M. Sugiyama, T. Morikawa, T. Tatsumi, T. Aoyama, F. Sato, A 1.3-um Operation Si-Based Planar P-I-N Photodiode with Ge Absorption Layer Using Strain-Relaxing Selective Epitaxial Growth Technology The Japan Society of Applied Physics. ,vol. 1998, pp. 384- 385 ,(1998) , 10.7567/SSDM.1998.D-6-7
Armin Splett, Klaus Petermann, Bernd Schuppert, Joachim Schmidtchen, Semiconductor element with a silicon layer ,(1991)
Andrzej J. Dabrowski, Large area avalanche photodiode array ,(1997)
Sebastian M. Csutak, Optical device and method therefor ,(2001)
Cheng C. Ko, Barry Levine, Planar avalanche photodiode ,(2003)
Igor Sankin, Janna B. Dufrene, Power sic devices having raised guard rings ,(2003)