Large improvement in HgCdTe photovoltaic detector performances at LETI

作者: G. Destefanis , J. P. Chamonal

DOI: 10.1007/BF02817520

关键词: Cutoff frequencyOpticsChemistryDiodeQuantum efficiencyFigure of meritSaturation currentDark currentHomojunctionHeterojunction

摘要: The standard infrared photovoltaic technology developed for HgCdTe by LETI and industrialized SOFRADIR is based on the very simple approach of planar ion-implanted n-on-p homojunctions. Both growth liquid-phase epitaxy excellent-quality epitaxial layers simplicity process enables state-of-the-art detectors to be achieved with a high technological yield. These present shunt impedance, good quantum efficiency, low l/f noise level. diodes are diffusion-limited down temperatures much lower than 77K. Their saturation current limited minority-carrier lifetime in p-side material. R0A values around 30 ohm-cm2 routinely obtained 10.0 μm cutoff wavelength at In this paper, we show that new can increase diode more one order magnitude. This effect as result an homojunction configuration. maximum value was 655 detector Furthermore, other figures merit efficiency or impedance slightly improved, not affected. data presented 40–200K temperature range 9–13 decrease dark kept throughout these ranges. Therefore, lead large R0A, close theoretical limits comparable published p-on-n heterojunctions.

参考文章(9)
Paul R. Norton, Infrared image sensors Optical Engineering. ,vol. 30, pp. 1649- 1663 ,(1991) , 10.1117/12.56001
G.L. Destéfanis, Electrical doping of HgCdTe by ion implantation and heat treatment Journal of Crystal Growth. ,vol. 86, pp. 700- 722 ,(1988) , 10.1016/0022-0248(90)90798-P
B. Pelliciari, State of the art of LPE HgCdTe at LIR Journal of Crystal Growth. ,vol. 86, pp. 146- 160 ,(1988) , 10.1016/0022-0248(90)90712-T
A. Rogalski, Analysis of the R0A product in n+-p Hg1−xCdxTe photodiodes Infrared Physics. ,vol. 28, pp. 139- 153 ,(1988) , 10.1016/0020-0891(88)90002-4
L.O. Bubulac, Defects, diffusion and activation in ion implanted HgCdTe Journal of Crystal Growth. ,vol. 86, pp. 723- 734 ,(1988) , 10.1016/0022-0248(90)90799-Q
A. Rogalski, A. Jóźwikowska, K. Jóźwikowski, J. Rutkowski, Performance of p+−n HgCdTe photodiodes Infrared Physics. ,vol. 33, pp. 463- 473 ,(1992) , 10.1016/0020-0891(92)90061-W
G. N. Pultz, Growth and characterization of P-on-n HgCdTe liquid-phase epitaxy heterojunction material for 11–18 μm applications Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 9, pp. 1724- 1730 ,(1991) , 10.1116/1.585406
G L Destefanis, HgCdTe infrared diode arrays Semiconductor Science and Technology. ,vol. 6, ,(1991) , 10.1088/0268-1242/6/12C/017
C. C. Wang, Mercury cadmium telluride junctions grown by liquid phase epitaxy Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 9, pp. 1740- None ,(1991) , 10.1116/1.585409