Flying image of a maskless exposure system
作者： Wenhui Mei
DOI:
关键词: Computer graphics (images) 、 Lens (optics) 、 Image (mathematics) 、 Photolithography 、 Computing systems 、 Pixel 、 Engineering
摘要: A system for image-scanning a pixel-mask pattern onto subject, such as subject in digital photolithography, is provided. The includes pixel panel generating formed of elements. lens positioned between the and simultaneously directs elements to subject. mirror enables direct portion at any one time. computing may be used generate provide predetermined sequence.
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