Theoretical and experimental analyses of tunable fabry-perot resonators using piezoelectric phononic crystals

作者: Marie-fraise Ponge , Bertrand Dubus , Christian Granger , Jerome O. Vasseur , Mai Pham Thi

DOI: 10.1109/TUFFC.2014.006919

关键词: PiezoelectricityElectromechanical coupling coefficientBand gapAntiresonanceTransducerMaterials scienceCoupling coefficient of resonatorsResonatorOpticsBoundary value problem

摘要: Theoretical and experimental analyses of piezoelectric stacks submitted to periodical electrical boundary conditions via electrodes are conducted. The presented structures exhibit Bragg band gaps that can be switched on or off by setting in short open circuit. gap frequency width is determined the electromechanical coupling coefficient. This property used design a Fabry-Perot cavity delimited periodic stack. An analytical model based transfer matrix formalism wave propagation inside structure. resonance tunability obtained varying length (i.e., spatially shifting stack). 26% tuning antiresonance frequencies with almost constant coefficient 5% theoretically predicted for an NCE41 resonator. To optimize device, influence various parameters investigated. length, phononic crystal (number unit cells), transducer position adapted tune shift When located at nodal plane cavity, value 30%. Experimental results discussed analyzing effects damping.

参考文章(18)
Bertrand Dubus, Future Trends in Acoustic RF MEMS Devices Springer, Boston, MA. pp. 95- 117 ,(2013) , 10.1007/978-1-4419-8798-3_4
Stéphane Razafimandimby, Cyrille Tilhac, Andreia Cathelin, Andreas Kaiser, Tunable BAW Filters Springer, Boston, MA. pp. 207- 231 ,(2013) , 10.1007/978-1-4419-8798-3_8
K.M. Lakin, Coupled resonator filters internaltional ultrasonics symposium. ,vol. 1, pp. 901- 908 ,(2002) , 10.1109/ULTSYM.2002.1193543
C. Zinck, E. Defay, A. Volatier, G. Caruyer, D.P. Tanon, L. Figuiere, Design, integration and characterization of PZT tunable FBAR international symposium on applications of ferroelectrics. pp. 29- 32 ,(2004) , 10.1109/ISAF.2004.1418330
P. V. Santos, L. Ley, J. Mebert, O. Koblinger, Frequency gaps for acoustic phonons in a-Si:H/a-SiN x :H superlattices Physical Review B. ,vol. 36, pp. 4858- 4867 ,(1987) , 10.1103/PHYSREVB.36.4858
Bertrand Dubus, Marie-Fraise Ponge, Anne-Christine Hladky, Jerome Vasseur, Mai Phamthi, Highly tunable Fabry-Perot resonators using piezoelectric phononic crystals internaltional ultrasonics symposium. pp. 154- 157 ,(2014) , 10.1109/ULTSYM.2014.0039
Alexandre Volatier, Emmanuel Defaÿ, Marc Aïd, Amy N’hari, Pascal Ancey, Bertrand Dubus, Switchable and tunable strontium titanate electrostrictive bulk acoustic wave resonator integrated with a Bragg mirror Applied Physics Letters. ,vol. 92, pp. 032906- ,(2008) , 10.1063/1.2837616
Tomoya Komatsu, Ken-ya Hashimoto, Tatsuya Omori, Masatsune Yamaguchi, Tunable Radio-Frequency Filters Using Acoustic Wave Resonators and Variable Capacitors Japanese Journal of Applied Physics. ,vol. 49, pp. 07HD24- ,(2010) , 10.1143/JJAP.49.07HD24
A. Noeth, T. Yamada, P. Muralt, A. Tagantsev, N. Setter, Tunable thin film bulk acoustic wave resonator based on Ba x Sr 1-x TiO 3 thin film IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 57, pp. 379- 385 ,(2010) , 10.1109/TUFFC.2010.1417
M. Schreiter, R. Gabl, D. Pitzer, R. Primig, W. Wersing, Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators Journal of The European Ceramic Society. ,vol. 24, pp. 1589- 1592 ,(2004) , 10.1016/S0955-2219(03)00406-0