Design, integration and characterization of PZT tunable FBAR
作者： C. Zinck , E. Defay , A. Volatier , G. Caruyer , D.P. Tanon
DOI: 10.1109/ISAF.2004.1418330
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摘要: This work presents the elaboration and characterization of PZT film bulk acoustic resonators. Resonators are elaborated by deep reactive ion etching silicon. present quite small electromechanical characteristics (k/sub 33//sup 2/ Q). Ferroelectric properties thin make possible tuning frequency resonance. Butterfly dependencies were both observed for series parallel resonances.
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