Fabrication of Ferroelectric Components and Devices
作者： Andrei Vorobiev , Spartak Gevorgian
DOI: 10.1007/978-1-84882-507-9_3
关键词: Deposition (phase transition) 、 Ferroelectric capacitor 、 Single crystal growth 、 Microwave 、 Optoelectronics 、 Ferroelectricity 、 Thin film 、 Slicing 、 Fabrication 、 Materials science
摘要: The subject of this chapter is fabrication ferroelectric components and microwave tunable devices based on them. main methods are considered including the single crystal growth slicing techniques; bulk ceramic sintering; thick film, HTCC LTCC technologies; chemical physical deposition methods. in association with structural characterizations which allows one to establish correlations between processing parameters device performance. basic principles details utilizing given by examples described Chap. 5. Special sections describe general technology platforms thin films grown
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