作者: Seth A. Hara , Brian J. Kim , Jonathan T. W. Kuo , Ellis Meng
DOI: 10.1109/JMEMS.2015.2434827
关键词: Materials science 、 Microelectrode 、 Microfabrication 、 Thermoforming 、 Electrode 、 Dielectric spectroscopy 、 Analytical chemistry 、 Nanotechnology 、 Cyclic voltammetry 、 Polymer substrate 、 Parylene
摘要: The electrochemical (EC) properties of microelectrodes on flexible polymer substrates can vary as a result microfabrication and postfabrication processes. These in turn may impact the chronic recording performance such electrodes. In this paper, techniques were utilized for preparation nonbiological evaluation microfabricated neural probes consisting platinum electrode sites supported insulated by Parylene C. substrate mitigates mechanical mismatch between tissue probe. addition, thermoplastic nature enables probe to be shaped using thermoforming technique impart unique 3-D structure that further promotes integration supports use bioactive coatings. EC provided simple means clean surfaces (80.2% decrease 1-kHz impedance), identify functional devices, evaluate their prior implant. Both impedance spectroscopy cyclic voltammetry measurements performed following fabrication, cleaning, manipulation assembly, thermoforming, sterilization. results reveal some cases changes properties. Although did not ability acquire electrophysiological recordings, investigation with additional tools is required elucidate exact structural resulting observed increase reduction surface area thermoforming. [2014-0378]