Application oriented MEMS by open collaboration
作者： Masayoshi Esashi
DOI: 10.1109/ICSICT.2008.4735114
关键词: Silicon carbide 、 Feedthrough 、 Wafer 、 Electronic engineering 、 Gyroscope 、 Silicon 、 Probe card 、 Optoelectronics 、 Microelectromechanical systems 、 Materials science 、 Etching (microfabrication)
摘要: Silicon MEMS as electrostatically levitated rotational gyroscope and 2D optical scanner, wafer level packaged devices integrated capacitive pressure sensor swatch are described. which use non-silicon materials diamond, CNT (carbon nano tube), LTCC with electrical feedthrough, SiC (silicon carbide) LiNbO3 for multi-probe data storage, multi-column electron beam lithography system, probe card wafer-level burn-in test, mold glass press molding SAW wireless passive respectively also
sci-hub.se 参考文章(10)
Takashi Abe, Xinghua Li, Masayoshi Esashi, Endpoint detectable plating through femtosecond laser drilled glass wafers for electrical interconnections Sensors and Actuators A-physical. ,vol. 108, pp. 234- 238 ,(2003) , 10.1016/S0924-4247(03)00262-0
T. Tajima, T. Nishiguchi, S. Chiba, A. Morita, M. Abe, K. Tanioka, N. Saito, M. Esashi, High-performance ultra-small single crystalline silicon microphone of an integrated structure Microelectronic Engineering. ,vol. 67, pp. 508- 519 ,(2003) , 10.1016/S0167-9317(03)00108-4
Takahito Ono, Hidetoshi Miyashita, Masayoshi Esashi, Electric-field-enhanced growth of carbon nanotubes for scanning probe microscopy Nanotechnology. ,vol. 13, pp. 62- 64 ,(2002) , 10.1088/0957-4484/13/1/314
Masayoshi Esashi, Encapsulated micro mechanical sensors Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 1, pp. 2- 9 ,(1994) , 10.1007/BF01367754
H. Henmi, S. Shoji, Y. Shoji, K. Yoshimi, M. Esashi, Vacuum packaging for microsensors by glass-silicon anodic bonding Sensors and Actuators A-physical. ,vol. 43, pp. 243- 248 ,(1994) , 10.1016/0924-4247(94)80003-0
Shinya Yoshida, Takahito Ono, Masayoshi Esashi, Conductive polymer patterned media for scanning multiprobe data storage Nanotechnology. ,vol. 18, pp. 505302- ,(2007) , 10.1088/0957-4484/18/50/505302
Takao Murakoshi, Yasuo Endo, Keisuke Fukatsu, Sigeru Nakamura, Masayoshi Esashi, Electrostatically Levitated Ring-Shaped Rotational-Gyro/Accelerometer Japanese Journal of Applied Physics. ,vol. 42, pp. 2468- 2472 ,(2003) , 10.1143/JJAP.42.2468
Hirokazu Takahashi, Astushi Onoe, Takahito Ono, Yasuo Cho, Masayoshi Esashi, High-Density Ferroelectric Recording Using Diamond Probe by Scanning Nonlinear Dielectric Microscopy Japanese Journal of Applied Physics. ,vol. 45, pp. 1530- 1533 ,(2006) , 10.1143/JJAP.45.1530
Kentaro Totsu, Masayoshi Esashi, Gray-scale photolithography using maskless exposure system Journal of Vacuum Science & Technology B. ,vol. 23, pp. 1487- 1490 ,(2005) , 10.1116/1.1943438
N. Asada, H. Matsuki, K. Minami, M. Esashi, Silicon micromachined two-dimensional galvano optical scanner IEEE Transactions on Magnetics. ,vol. 30, pp. 4647- 4649 ,(1994) , 10.1109/20.334177