MEMS sensor structure and microfabrication process therefor

摘要: A micro-electro-mechanical structure including a semiconductor layer mounted to an annular support via isolation wherein the is micromachined form suspended body having plurality of suspension projections extending from rim and groups integral toward but spaced between said projections. Each projection in has base attached tip proximate rim. The includes inward supported on body. such body; grouped are arranged interdigitated fashion define pairs independent elements that primary capacitive gap defined each pair. Also, process disclosed for fabricating steps removing highly doped etch termination thereafter etching through lightly epitaxial thereby release structure.