Development of a lithium liquid metal ion source for MeV ion beam analysis
作者： P.M. Read , J.T. Maskrey , G.D. Alton
DOI:
关键词: Ion beam 、 Atomic physics 、 Ion source 、 Ion beam analysis 、 Ion gun 、 Ion beam deposition 、 Liquid metal ion source 、 Chemistry 、 Secondary ion mass spectrometry 、 Focused ion beam
摘要: Lithium liquid metal ion sources are an attractive complement to the existing gaseous that extensively used for beam analysis. This is due in part high brightness of source and availability a lithium beam. High particular importance MeV microprobes which now approaching current density limitations on targets determined by source. The provides increased capabilities hydrogen profiling resolution Rutherford backscattering spectrometry. paper describes design performance suitable use 5MV Laddertron accelerator. Operational experience with some its uses analysis discussed. 8 refs., 2 figs.
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