作者: Joseph M. Welty
DOI:
关键词: Printed circuit board 、 Electronic engineering 、 Engineering 、 Planar electrode 、 Radio frequency 、 Electrode 、 Optoelectronics 、 Rack 、 Gas plasma 、 Planar
摘要: Gas plasma reactor for treatment of printed circuit boards and other relatively large, generally planar objects. The includes a rack assembly having plurality spaced apart bars holding the objects pair electrodes positioned outside assembly. is maintained at ground potential, are energized with RF energy to form an ionizing field between bars.