Gas plasma reactor for circuit boards and the like

作者: Joseph M. Welty

DOI:

关键词: Printed circuit boardElectronic engineeringEngineeringPlanar electrodeRadio frequencyElectrodeOptoelectronicsRackGas plasmaPlanar

摘要: Gas plasma reactor for treatment of printed circuit boards and other relatively large, generally planar objects. The includes a rack assembly having plurality spaced apart bars holding the objects pair electrodes positioned outside assembly. is maintained at ground potential, are energized with RF energy to form an ionizing field between bars.