Disturbance estimation and compensation for planar motors on the long-stroke stage of a wafer stage
作者： Bizhong Xia , Cuiping Yuan , Yong Tian , Shuang Wu , Kaiming Yang
关键词: Compensation (engineering) 、 Disturbance (geology) 、 Stroke (engine) 、 Planar 、 Wafer 、 Control theory 、 Computer science 、 Stage (hydrology) 、 Control engineering
摘要: This article presents a data-based method to estimate and compensate low-frequency disturbance in planar motors on the long-stroke stage of wafer stage, which is typical multiple-input multiple...
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