Attenuation of disturbances introduced by dynamic links in precision motion systems using model-based observers

摘要: This paper presents an extension to the Unknown Input Disturbance Observer (UIDO) and Estimation Filter (DEF). enables inclusion of mechanics dynamic links observer model, in order attenuate specific disturbances introduced by those links. A design method state space feedback gain based on dynamics, basic Kalman filter theory is given. It shown how designed for a practical example; cable schlepp within wafer stage lithography machine. Using simple model disturbance has been validated with experiment actual machine