Microelectronic photomultiplier device with integrated circuitry
作者： Randy L. Shimabukuro , Stephen D. Russell
DOI:
关键词: Photomultiplier 、 Electrical engineering 、 Detector 、 Engineering 、 High voltage 、 Integrated circuit 、 Optoelectronics 、 Microelectronics 、 Dynode 、 Silicon photomultiplier 、 Reliability (semiconductor)
摘要: A microelectronic photomultiplier device is fabricated by discrete proceds to provide a photocathode-anode and dynode chain arrangement which analogous in operation conventional tubes. This provides for low level photon detection realizes the advantages of high reliability, small size fast response, plus lower cost, weight power consumption compared In addition, fabrication on an SOI substrate permits integration logic control circuitry with detectors. The insulating also on-chip voltage supply may easily be extended plurality detectors offering improved performance design flexibility.
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