Inductively coupled plasma reactor with multiple magnetic cores
作者： Dae-Kyu Choi
DOI:
关键词: Electromotive force 、 Plasma 、 Radio frequency power transmission 、 Magnetic core 、 Atomic physics 、 Transformer 、 Chemistry 、 Inductively coupled plasma 、 Capacitively coupled plasma
摘要: There is provided an inductively coupled plasma reactor. The reactor connected to a transformer with multiple magnetic cores and primary winding, transfer electromotive force for discharge chamber of body. Parts core positioned in side the are protected by being entirely covered protecting tube. winding electrically power supply source providing radio frequency power. In reactor, since number cross sectional parts inside chamber, efficiency transferring energy be very high.
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