Simultaneous discharge device
作者： Kazuto Ohbuchi
DOI:
关键词:
摘要: In a simultaneous discharge device for discharging inside of two chambers 4, 14 simultaneously by single high-frequency power supply P, electric dividing means 20 connects P to 14, wherein comprises first conductor plate 21 which the respective electrodes 4,14, second 23 end Rf cables 22 in said and bar 24 electrically plates at plurality positions so that an impedance between each becomes equal.
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