Dual cathode sputter coating apparatus
作者： Roland Gesche , Wolfgang Stang , Michael Scherer , Peter Mahler
DOI:
关键词:
摘要: In a coating apparatus, sputter cathode (1) has, directly side by side, two electrodes (2, 3) connected in common to high-frequency generator and having each target (9, 10). The targets 10) of both abut one another with straight edge (11, 12). A dark space shield surrounds together.
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