Staggered target tiles

摘要: A sputtering target, particularly for sputter depositing a target material onto large rectangular panels, in which plurality of tiles are bonded to backing plate two-dimensional non-rectangular array such that the meet at interstices no more than three tile, thus locking against excessive misalignment during bonding. The may be arranged staggered rows or herringbone zig-zag pattern. Hexagonal and triangular also provide many advantages invention.