FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY USING SEMI-CONDUCTOR STRAIN GAUGE WHICH IS ADAPTING CMOS CIRCUIT, FABRICATION METHOD THEREOF AND MEASUREMENT METHOD THEROF
作者： Kang Dae Im , Song Han Wook , Park Yon Kyu , Kim Min Seok , Lee Sung Jun
DOI:
关键词: CMOS 、 Optoelectronics 、 Layer (electronics) 、 Electrode 、 Strain gauge 、 Fabrication 、 Printed circuit board 、 Semiconductor 、 Deformation (engineering) 、 Materials science
摘要: PURPOSE: Flexible force or a pressure sensor array of semiconductor strain gauge applying CMOS(Complementary Metal-Oxide Semiconductor) circuit method, method for manufacturing the flexible and array, measuring using are provided to obtain chemically stable structure. CONSTITUTION: CMOS comprises board(10) pair elastic polymer layers(20,30). The board gauge, high molecule film layer, circuit, first signal lines, second switch controlling unit. plurality unit bodies formed into predetermined patterns, thereby being transformed by force. lines connected form an electrode output deformation signals each body. controls successively scans make current flow in one lines. layers both surface so that is included inside.
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