Metal-armouring for shock protection of MEMS ☆
作者： A.K. Delahunty , W.T. Pike
DOI: 10.1016/J.SNA.2013.11.008
关键词: Acceleration 、 Deep reactive-ion etching 、 Armour 、 Metal 、 Microelectromechanical systems 、 Soldering 、 Materials science 、 Suspension (vehicle) 、 Structural engineering 、 Composite material 、 Shock (mechanics)
摘要: … 90% of the collision kinetic energy and double the shock resistance of the MEMS suspension. … This work presents a novel shock-protection method for MEMS which successfully satisfies …
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imperial.ac.uk 参考文章(26)
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