Modeling, parameter estimation, and open-loop control of MEMS deformable mirrors
作者： Curtis R. Vogel , Glenn A. Tyler , Yang Lu
DOI: 10.1117/12.846363
关键词: Open-loop controller 、 Actuator 、 Least squares 、 Control theory 、 Estimation theory 、 Microelectromechanical systems 、 Mathematics 、 Deformable mirror 、 Adaptive optics 、 Partial differential equation
摘要: We present a model for MEMS deformable mirrors (DMs) that couples 2-dimensional, linear 4th order partial differential equation the DM facesheet with spring models actuators. estimate the parameters in this using method of output least squares, and we demonstrate effectiveness this approach data from 140-actuator test mirror produced at Boston University. A scheme robust, computationally efficient open-loop control, which is based on model, also presented.
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