Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control
作者： Jason B. Stewart , Alioune Diouf , Yaopeng Zhou , Thomas G. Bifano
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摘要: A method is introduced for predicting control voltages that will generate a prescribed surface shape on MEMS deformable mirror. The algorithm based upon an analytical elastic model of the mirror membrane and empirical electromechanical its actuators. It computationally simple inherently fast. Shapes at limit achievable spatial frequencies with up to 1.5 μm amplitudes have been achieved less than 15 nm rms error.
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