Measurement of surface roughness in buried channel waveguides
作者： F. Ladouceur , J.D. Love , T.J. Senden
DOI: 10.1049/EL:19920839
关键词: Surface finish 、 Light scattering 、 Edge (geometry) 、 Fabrication 、 Materials science 、 Surface roughness 、 Communication channel 、 Microscope 、 Core (optical fiber) 、 Optics
摘要: An atomic force microscope is employed in a novel method for measuring the edge roughness of masks used fabrication rectangular-core buried channel waveguides. Light attenuation due to scattering loss from sides core can then be estimated using simple statistical model data.
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