Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model

摘要: In this letter, we experimentally evaluate the effect of miniaturization and surface roughness on transmission losses within a Si/SiO2 waveguide system, explain results using theoretical model. Micrometer/nanometer-sized waveguides are imperative for its potential use in dense integrated optics optical interconnection silicon circuits. A model was employed to predict relationship between dielectric width. This accurately predicts that loss increases as width decreases. Furthermore, show major source comes from sidewall roughness. We have constructed complete contour map showing interdependence loss, assist users their design an optimal fabrication process minimizes loss. Additionally, can find effective path reduce scattering Using map, confirm n...