A two degrees-of-freedom piezoelectric single-crystal micromotor
作者： Zhijiang Chen , Xiaotian Li , Guoxi Liu , Shuxiang Dong
DOI: 10.1063/1.4903834
关键词: Acoustics 、 Slider 、 Standing wave 、 Piezoelectricity 、 Vibration 、 Ultrasonic motor 、 Physics 、 Ultrasonic sensor 、 Actuator 、 Stator
摘要: A two degrees-of-freedom (DOF) ultrasonic micromotor made of piezoelectric Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (PIN-PMN-PT) single crystal square-bar (dimensions 2 × 2 × 9 mm3) was developed. The PIN-PMN-PT stator can generate standing wave elliptical motions in orthogonal vertical planes by combining the first longitudinal and second bending vibration modes, enabling it to drive a slider directions. relatively large driving forces 0.25 N motion speed 35 mm/s were obtained under voltage 80 Vpp at its resonance frequency 87.5 kHz. proposed has potential for applications micro robots, cell manipulators, digital cameras as two-DOF actuator.
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