Apparatus for and method of detecting/identifying microbial contamination in ultra-pure water systems

摘要: An apparatus for and a method of on-line detecting assessing, in situ,he amount characterization microbial trace contamination an associated ultra-pure water system is disclosed. The comprises, inter alia, monitor/detector portion assessment/identification portion. includes mass detector which nondestructively senses the presence biofilms real time when grown upon surface quartz crystal wafer detector. configured to provide quantitative analysis formations based on signature biomarker cellular components. A programmable controller integrate these other portions into automated apparatus, capable providing chemical countermeasures prevent potential deleterious effect uncovered.