Semiconductor device and method of manufacturing the semiconductor device
作者： Je-min Park
DOI:
关键词: Capacitance 、 Optoelectronics 、 Electrode 、 Semiconductor device 、 Plate electrode 、 Capacitor 、 Dielectric layer 、 Materials science
摘要: A semiconductor device has a stabilizing member that encloses an upper portion of storage electrode to improve structural stability. dielectric layer and plate are successively formed on the including member. Since includes protruding support adjacent electrode, all electrodes in unit cell structured prevent collapse. Also, semdevice can have very high height without collapse when capacitors extremely aspect ratios. Therefore, may greatly enhanced capacitance comparison with conventional capacitor.
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