Structure of air column type vertical cavity surface emitting laser and its manufacturing method

摘要: The invention provides a structure and manufacturing method for an air cylinder vertical cavity laser, which belongs to semiconductor photoelectron field. includes p-type ohm contacting layers arranged from top down, upper Bragg reflector, AlxGa1-xAs (x is not less than 0.9) wet nitrogen oxide layer, active area unit, subjacent buffer substrate n-type electrode. character lies in: using selective corrosion corrode the reflector stop layer with method, then phase compensation other uses normal technology. traditional chemical reduces cost, upgrades performance reliability production efficiency of device.