STABLE, LOW-LOSS OPTICAL WAVEGUIDES AND MICROMIRRORS FABRICATED IN ACRYLATE POLYMERS

摘要: Acrylate-based optical waveguides have been fabricated with loss of 0.5 dB/cm at 1300 nm by means a new material system that ensures stable and mechanical properties over wide temperature range. No increase in was measured after 500 h temperatures up to 150 °C, there no significant during short (<5 min) excursions 300 °C for bonding. Single-mode were refractive indices core clad 1.505 1.500, respectively, so the mode field is very similar single-mode silica fiber. Guides on both planar structured substrates Si GaAs as well coated metals dielectrics. Fabrication involved spin coating UV exposure cross-link polymer, but substrate did not exceed 180 °C. With this method guides could be range 125 cm diameter, including those multilayer metallization multichip modules, providing interconnect capability. Microprism reflecting surfaces couple light out normal substrate. All processing compatible semiconductor fabrication.