Method of manufacturing superconducting microwave component substrate
作者： Hideo Itozaki , Kenjiro Higaki , Takashi Matsuura
DOI:
关键词: Superconductivity 、 Annealing (metallurgy) 、 Thin film 、 Optoelectronics 、 Thallium 、 Superconducting thin films 、 Microwave 、 Electronic engineering 、 Oxide 、 Materials science 、 Dielectric substrate
摘要: A substrate for a superconducting microwave component is composed of pair oxide superconductor thin films formed on opposite surfaces dielectric substrate, respectively. After Tl-type are deposited the respectively, am annealing performed in thallium atmosphere.
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