The microstructural properties of sputtered zinc oxide SAW transducers

摘要: The microstructural properties of sputtered zinc oxide, ZnO, were investigated and related to their effective surface acoustic wave, SAW, transducer capabilities. SAW films fabricated on glass using different deposition parameters produce levels efficiency. ZnO film microstructure was analysed X-ray diffraction, profilometer scanning electron microscope equipment. Etch techniques used further delineate the properties. low coupling factor had a crystalline content, rougher topography high etch rates. High highly ordered, structurally dense, smooth surfaced with characteristic single crystal oxide. differences relate growth conditions which defect density structure uniform polarity minimum fibre grain inversions weak intergrain boundaries Les proprietes microstructurales de l'oxyde pulverise sont etudiees et reliees leur aptitude la transduction piezoelectrique pour ondes surface. transducteurs onde deposes sur des supports en verre faisant varier les du depot facon atteindre differents degres d'efficacite transduction. La est analysee par diffraction X, profilometrie microscopie electronique balayage. Des gravure egalement employees preciser