Process for fabricating a MOS device having protection against electrostatic discharge

作者: Mario M. A. Pelella

DOI:

关键词: Metal gateProcess (computing)Materials scienceDiodeElectrostatic dischargeOptoelectronics

摘要: A MOS device having protection against electrostatic discharge includes a diode formed below the so that excess charge buildup in is conducted away from by diode.