Friction and wear properties of CrSiCN coatings with low carbon content as sliding against SiC and steel balls in water
作者： Zhiwei Wu , Fei Zhou , Kangmin Chen , Qianzhi Wang , Zhifeng Zhou
DOI: 10.1016/J.TRIBOINT.2015.08.032
关键词: Sputter deposition 、 X-ray photoelectron spectroscopy 、 Materials science 、 Trimethylsilane 、 Metallurgy 、 Wafer 、 Nanocomposite 、 Carbon 、 Scanning electron microscope 、 Microstructure
摘要: Abstract CrSiCN coatings were deposited on Si wafer and 316L stainless steels by using unbalanced magnetron sputtering system via adjusting the trimethylsilane (TMS) flows, their composition, microstructure nano-hardness characterized X-ray diffraction (XRD), photoelectrons spectroscopy (XPS), scanning electron microscopy (SEM) nano-indenter, respectively. The friction behaviors sliding against SiC SUS440C balls in water investigated. results showed that presented nanocomposite of Cr(C, N) nanocrystallites embedded into amorphous matrix Si–C–N. maximum hardness (19.1 GPa) at TMS flow 10 sccm. Compared with different mating balls, CrSiCN/SiC tribopairs exhibited better wear properties than CrSiCNS/SUS440C steel water.
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