作者: Qiang Ma , Fei Zhou , Qianzhi Wang , Zhiwei Wu , Kangmin Chen
DOI: 10.1039/C6RA09264K
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摘要: Cr–B–C–N coatings with different boron contents (24.6–27.2 at%) were deposited on Si(100) wafers and 316L stainless steels by using closed-field unbalanced magnetron sputtering via adjusting the CrB2 target current. The microstructures, mechanical tribological properties of in water characterized XRD, XPS, SEM, nano-indentation ball-on-disk tribometers. results showed that soft amorphous BN phases formed when elements introduced into CrCN coatings. With an increase current, B content increased from 24.9 to 27.2 at%, which caused a-BN CrBCN gradually, then hardness decreased 18.6 ± 0.86 GPa 16.3 0.28 GPa. Due formation H3BO3, friction coefficient wear rates CrBCN/SiC tribopairs lower than those CrCN/SiC tribopairs. When (25.1 at% B) at current 3 A, lowest values (0.16) rate (2.1 × 10−7 mm3 N−1 m−1) obtained simultaneously.