Structure and properties of Ti–B–C–N nanocomposite coatings synthesized using pulsed closed field unbalanced magnetron sputtering (P-CFUBMS)
作者： J. Lin , B. Mishra , J.J Moore , M. Pinkas , W.D. Sproul
DOI: 10.1016/J.SURFCOAT.2008.06.083
关键词:
摘要: Abstract Ti-B-C and Ti–B–C–N nanocomposite coatings with various nitrogen contents were synthesized by sputtering an 80 mol.%TiB 2 –20 mol.%TiC compound target in Ar/N plasma using a pulsed closed field unbalanced magnetron (P-CFUBMS) system. It was found that the structure, mechanical wear properties of exhibit strong dependence on content. When content is low range, e.g. 3 at.%, coating characterized as mixture Ti(B , C) nanocrystallines small volume fractions free carbon, amorphous BN CN x where super hardness 48.5 GPa has been achieved. increased, 10–13 at.%, reduction Ti(B, phase accompanied formation nanocrystalline Ti(C,N) phases observed. The can be Ti(B,C) imbedded BN, carbon matrix, which slight decrease (37–45 GPa), while improvements resistance indentified. further increased to high levels, 36 at.%, significant increase fraction crystalline will result both resistance.
elsevier.com
sci-hub.se 参考文章(22)
D. E. Wolfe, J. Singh, Synthesis and characterization of TiBCN coatings deposited by ion beam assisted, co-evaporation electron beam-physical vapor deposition (EB-PVD) Journal of Materials Science. ,vol. 37, pp. 3777- 3787 ,(2002) , 10.1023/A:1016533913894
Jianliang Lin, John J. Moore, Brajendra Mishra, Malki Pinkas, William D. Sproul, J.A. Rees, Effect of asynchronous pulsing parameters on the structure and properties of CrAlN films deposited by pulsed closed field unbalanced magnetron sputtering (P-CFUBMS) Surface & Coatings Technology. ,vol. 202, pp. 1418- 1436 ,(2008) , 10.1016/J.SURFCOAT.2007.06.068
O. Knotek, R. Breidenbach, F. Jungblut, F. Löffler, Superhard Ti-B-C-N coatings Surface & Coatings Technology. pp. 107- 115 ,(1990) , 10.1016/0257-8972(90)90065-K
WD Sproul, High-rate reactive DC magnetron sputtering of oxide and nitride superlattice coatings Vacuum. ,vol. 51, pp. 641- 646 ,(1998) , 10.1016/S0042-207X(98)00265-6
M. Stüber, V. Schier, H. Holleck, Properties and performance of new metastable Ti-B-C-N hard coatings prepared by magnetron sputtering Surface and Coatings Technology. ,vol. 74-75, pp. 833- 837 ,(1995) , 10.1016/0257-8972(95)08281-6
T.P. Mollart, J. Haupt, R. Gilmore, W. Gissler, Tribological behaviour of homogeneous TiBN, TiBNC and TiN/hBN/TiB2 multilayer coatings Surface and Coatings Technology. ,vol. 86-87, pp. 231- 236 ,(1996) , 10.1016/S0257-8972(96)02950-7
A.A. Voevodin, J.P. O'Neill, J.S. Zabinski, Nanocomposite tribological coatings for aerospace applications Surface & Coatings Technology. ,vol. 116, pp. 36- 45 ,(1999) , 10.1016/S0257-8972(99)00228-5
C. Mitterer, M. Rauter, P. Rödhammer, Sputter deposition of ultrahard coatings within the system Ti-B-C-N Surface & Coatings Technology. ,vol. 41, pp. 351- 363 ,(1990) , 10.1016/0257-8972(90)90146-4
In-Wook Park, Kwang Ho Kim, Augusto O. Kunrath, Dalong Zhong, John J. Moore, A. A. Voevodin, E. A. Levashov, Microstructure and mechanical properties of superhard Ti–B–C–N films deposited by dc unbalanced magnetron sputtering Journal of Vacuum Science & Technology B. ,vol. 23, pp. 588- 593 ,(2005) , 10.1116/1.1884125
J. Lin, B. Mishra, J.J. Moore, W.D. Sproul, J.A. Rees, Effects of the substrate to chamber wall distance on the structure and properties of CrAlN films deposited by pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS) Surface & Coatings Technology. ,vol. 201, pp. 6960- 6969 ,(2007) , 10.1016/J.SURFCOAT.2006.12.026