CMOS imager with selectively silicided gates
作者： Howard E. Rhodes
DOI:
关键词: CMOS 、 Coating 、 Shield 、 Electrical engineering 、 Materials science 、 Optoelectronics 、 Transistor 、 Silicide
摘要: The invention also relates to an apparatus and method for selectively providing a silicide coating over the transistor gates of CMOS imager improve speed gates. further includes forming self aligned photo shield imager.
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