Position determination system for determining the position of one relatively moveable part relative to another relatively movable part
作者： Iain Robert Gordon-Ingram , Michael Homer , Alan James Holloway
DOI:
关键词: Photodetector 、 In plane 、 Optics 、 Detector 、 Geography
摘要: A measurement scale (20) is movable in plane x relative to a mask (10) and photodetector (30). When pattern of apertures the are correlation with e.g. reference mark then light bands b c may propagate detector The sizes patterns such that converge at Other embodiments show divergent inversion incongruent patterns.
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