Photoelectric position measuring system that optimizes modulation of a scanning device and the intensity of a reference mark signal
作者： Andreas Franz , Elmar Mayer , Wolfgang Holzapfel
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摘要: An incremental position measuring system in the form of a three-grating sensor is optimized such way, that degree modulation (M) scanning device, as well intensity (I) reference marker signal are relatively strong. To this end, phase grating with an effective deviation λ/4 embodied on scale 2 , (R) amplitude structure. A compact structure achieved by divergent illumination located front scale.
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