Generalized ellipsometry characterization of sculptured thin films made by glancing angle deposition
作者： Daniel Schmidt , Eva Schubert , Mathias Schubert
DOI: 10.1007/978-3-642-33956-1_10
关键词: Optoelectronics 、 Ellipsometry 、 Layer (electronics) 、 Volume fraction 、 Materials science 、 Substrate (electronics) 、 Dielectric 、 Anisotropy 、 Monoclinic crystal system 、 Optics 、 Thin film
摘要: … with a single homogeneous biaxial layer. This homogeneous biaxial layer approach is … 13 to transparent biaxial thin films and concluded that non-absorbing slanted columnar thin …
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