Optical anisotropy of porous polymer film with inverse slanted nanocolumnar structure revealed via generalized spectroscopic ellipsometry
作者： Dan Liang , Derek Sekora , Charles Rice , Eva Schubert , Mathias Schubert
DOI: 10.1063/1.4929367
关键词: Inverse 、 Composite material 、 Ellipsometry 、 Anisotropy 、 Thin film 、 Optics 、 Cobalt 、 Polymer 、 Materials science 、 Porous medium 、 Porosity
摘要: We use generalized spectroscopic ellipsometry to characterize the biaxial optical properties of porous polymer and slanted nanocolumnar template thin films. The with inverse columnar structure was prepared via infiltrating into voids film selectively removing column material (cobalt). anisotropic Bruggeman effective medium approximation employed analyze data template. classification anisotropy are found be identical for both samples. interchangeable behaviors between two complementary structures attributed equivalency in their polarizabilities.
scitation.org
elsevier.com
aip.org 
sci-hub.se 参考文章(29)
Daniel Schmidt, Eva Schubert, Mathias Schubert, Generalized ellipsometry characterization of sculptured thin films made by glancing angle deposition Springer Berlin Heidelberg. pp. 341- 410 ,(2013) , 10.1007/978-3-642-33956-1_10
Hiroyuki Fujiwara, Spectroscopic Ellipsometry: Principles and Applications ,(2007)
Mohammed Ibn-Elhaj, Martin Schadt, Optical polymer thin films with isotropic and anisotropic nano-corrugated surface topologies Nature. ,vol. 410, pp. 796- 799 ,(2001) , 10.1038/35071039
D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, Generalized ellipsometry for monoclinic absorbing materials: determination of optical constants of Cr columnar thin films Optics Letters. ,vol. 34, pp. 992- 994 ,(2009) , 10.1364/OL.34.000992
Daniel Schmidt, Eva Schubert, Mathias Schubert, Optical properties of cobalt slanted columnar thin films passivated by atomic layer deposition Applied Physics Letters. ,vol. 100, pp. 011912- ,(2012) , 10.1063/1.3675549
T. Hofmann, D. Schmidt, A. Boosalis, P. Kühne, R. Skomski, C. M. Herzinger, J. A. Woollam, M. Schubert, E. Schubert, THz dielectric anisotropy of metal slanted columnar thin films Applied Physics Letters. ,vol. 99, pp. 081903- ,(2011) , 10.1063/1.3626846
Toshitaka Oka, Kenji Ito, Makoto Muramatsu, Toshiyuki Ohdaira, Ryoichi Suzuki, Yoshinori Kobayashi, Porogen approach for the fabrication of plasma-polymerized nanoporous polysiloxane films. Journal of Physical Chemistry B. ,vol. 110, pp. 20172- 20176 ,(2006) , 10.1021/JP063013T
D. Liang, D. Schmidt, H. Wang, E. Schubert, M. Schubert, Generalized ellipsometry effective medium approximation analysis approach for porous slanted columnar thin films infiltrated with polymer Applied Physics Letters. ,vol. 103, pp. 111906- ,(2013) , 10.1063/1.4821159
I. S. Nerbø, S. Le Roy, M. Foldyna, M. Kildemo, E. Søndergård, Characterization of inclined GaSb nanopillars by Mueller matrix ellipsometry Journal of Applied Physics. ,vol. 108, pp. 014307- ,(2010) , 10.1063/1.3386460
Christophe Sinturel, Marylène Vayer, Michael Morris, Marc A. Hillmyer, Solvent Vapor Annealing of Block Polymer Thin Films Macromolecules. ,vol. 46, pp. 5399- 5415 ,(2013) , 10.1021/MA400735A