Experimental validation and simulation of collisionless bounce-resonance heating in capacitively coupled radio-frequency discharges
作者： Yong-Xin Liu , Quan-Zhi Zhang , Wei Jiang , Wen-Qi Lu , You-Nian Wang
DOI: 10.1088/0963-0252/21/3/035010
关键词: Radio frequency 、 Light emission 、 Electron 、 Atomic physics 、 Low frequency 、 Plasma 、 Excitation 、 Monte Carlo method 、 Physics 、 Resonance
摘要: In low-pressure capacitively coupled radio-frequency discharges, when the driving frequency and discharge gap satisfy certain resonant conditions, high-energy beam-like electrons generated by fast sheath expansion are bounced back forth between two edges, during which they can gain energy in each of collisions with either expanding sheaths, consequently be heated sheaths coherently. This is so-called collisionless electron bounce-resonance heating (BRH). The first experimental evidence BRH was reported Liu et al (2011 Phys. Rev. Lett. 107 055002). Using a combined measurement floating double probe optical-emission spectroscopy, we further demonstrate effect on plasma properties, such as density light emission. It found that excitation enhanced due to have significant dependence length, pressure, low frequency, high-frequency power presented discussed detail. These observations explained satisfactorily self-consistent 1D3v particle-in-cell/Monte Carlo collision simulation more
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