Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges

摘要: In low-pressure capacitively coupled plasmas, high-energy electrons are collisionlessly heated by large rf fields in the sheaths while low-energy confined bulk plasma ambipolar potential. Low-energy typically inefficiently due to their low collisionality and weak electric field present bulk. It is shown, however, that as a result of nonlinear interaction between electron motion bulk, can be efficiently heated. Electrons bounce inside electrostatic potential well with frequency equal excitation coherent field. This resonant collisionless heating very efficient manifest itself plateau energy probability function.