Feature of electron energy distribution in a low-pressure capacitive discharge
作者： S. J. You , C. W. Chung , H. Y. Chang
DOI: 10.1063/1.1928320
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摘要: The evolution of the electron energy distribution function is investigated in low-pressure capacitive discharge under collisionless heating regime, where mean-free path comparable to or larger than system length. As gas pressure decreases from 50 10 mTorr, a different feature with plateau low-energy range, indicating strong that found. This observed result can be explained terms interaction between bouncing motion and oscillating sheath [Y. M. Aliev, I. D. Kaganovich, H. Schuter, Phys. Plasmas 4, 2413 (1997)]. A simple calculation diffusion coefficient, including bounce effect, good agreement experiment.
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