On simplifying approaches to the solution of the Boltzmann equation in spatially inhomogeneous plasmas
作者： U Kortshagen , C Busch , L D Tsendin
DOI: 10.1088/0963-0252/5/1/001
关键词: Statistical physics 、 Basis (linear algebra) 、 Component (thermodynamics) 、 Chemistry 、 Kinetic energy 、 Boltzmann equation 、 Electron 、 Range (mathematics) 、 Plasma 、 Ionization
摘要: … spatial dependence of the EDF is much more severe than that of the quasielastic ones. In the same way as the excitation … to the random walk character of the electron motion, the spatial …
harvard.edu
sci-hub.se 参考文章(71)
Yu. Benke, Yu. B. Golubosvkii, Kinetic description of confined electrons in gas discharge plasmas Optics and Spectroscopy. ,vol. 73, pp. 37- 46 ,(1992)
H. Margenau, L. M. Hartman, Theory of High Frequency Gas Discharges. II. Harmonic Components of the Distribution Function 1 Physical Review. ,vol. 73, pp. 309- 315 ,(1948) , 10.1103/PHYSREV.73.309
L. C. Pitchford, S. V. ONeil, J. R. Rumble, Extended Boltzmann analysis of electron swarm experiments Physical Review A. ,vol. 23, pp. 294- 304 ,(1981) , 10.1103/PHYSREVA.23.294
Ira B. Bernstein, T. Holstein, Electron Energy Distributions in Stationary Discharges Physical Review. ,vol. 94, pp. 1475- 1482 ,(1954) , 10.1103/PHYSREV.94.1475
Peter L. G. Ventzek, Timothy J. Sommerer, Robert J. Hoekstra, Mark J. Kushner, Two‐dimensional hybrid model of inductively coupled plasma sources for etching Applied Physics Letters. ,vol. 63, pp. 605- 607 ,(1993) , 10.1063/1.109963
Mark J. Kushner, Application of a particle simulation to modeling commutation in a linear thyratron Journal of Applied Physics. ,vol. 61, pp. 2784- 2794 ,(1987) , 10.1063/1.337868
A. D. MacDonald, J. H. Matthews, ELECTRICAL BREAKDOWN IN ARGON AT ULTRAHIGH FREQUENCIES Canadian Journal of Physics. ,vol. 34, pp. 395- 397 ,(1956) , 10.1139/P56-046
V. I. Kolobov, W. N. G. Hitchon, Electron distribution function in a low-pressure inductively coupled plasma Physical Review E. ,vol. 52, pp. 972- 980 ,(1995) , 10.1103/PHYSREVE.52.972
R. Winkler, M. Dilonardo, M. Capitelli, J. Wilhelm, Attachment and ionization in a self-consistent treatment of the electron kinetics of a collision-dominated rf plasma Plasma Chemistry and Plasma Processing. ,vol. 7, pp. 245- 265 ,(1987) , 10.1007/BF01016516
V Vahedi, G DiPeso, C K Birdsall, M A Lieberman, T D Rognlien, Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. I. Analysis of numerical techniques Plasma Sources Science and Technology. ,vol. 2, pp. 261- 272 ,(1993) , 10.1088/0963-0252/2/4/006