摘要: This paper reviews the most commonly used methods for generation of plasmas with special emphasis on non-thermal, low-temperature technological applications. We also discuss various technical realizations plasma sources selected is further limited to discussion that employ electric fields. The described include dc glow discharges, either operated continuously (CW) or pulsed, capacitively and inductively coupled rf helicon microwave discharges. Various examples in closed structures (cavities), open (surfatron, planar source), magnetic fields (electron cyclotron resonance sources) are discussed detail. Finally, we mention dielectric barrier discharges as convenient non-thermal at high pressures (up atmospheric pressure) beam-produced plasmas. It main objective this give an overview wide range diverse highlight broad spectrum properties which, turn, lead a
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