Field emission and lifetime of microcavity plasma

摘要: Microplasmas with cylindrical hollow cathode have been studied by means of two-dimensional particle-in-cell/Monte-Carlo collision (PIC/MCC) simulations. For a given input power, the onset field emission from surface caused strong electric generated in these discharges leads to reduction discharge voltage and an increase plasma density. The density profile can be strongly influenced localized enhancements field, which turn will affect erosion cathode. is predicted this work combining ion kinetic information obtained PIC/MCC simulation sputtering yield computed using SRIM [J. F. Ziegler, J. P. Biersack, M. D. SRIM: Stopping Range Ions Matter (Lulu, Chester, 2008)]. entrance center region are areas most susceptible ion-induced damage. lifetime device, however, extended operating dev...