作者: Alan R Hoskinson , Jeffrey Hopwood
DOI: 10.1088/0963-0252/21/5/052002
关键词:
摘要: We present a novel array of microplasma sources consisting microwave resonators arranged in two-dimensional grid. When power is supplied to one these resonators, it shared among the entire array. Microplasmas are generated between end each resonator and ground plane resulting ‘sheet’ plasma. The source design, results electromagnetic modeling, initial experimental described.