Mode transition induced by low-frequency current in dual-frequency capacitive discharges.
作者： H. C. Kim , J. K. Lee
DOI: 10.1103/PHYSREVLETT.93.085003
关键词:
摘要: The mode transition induced by varying the low-frequency current in low-pressure dual-frequency discharges argon is found through particle-in-cell or Monte Carlo simulations. As (2 MHz) increases for fixed high-frequency (27 current, electron distribution function (EDF) changes from Druyvesteyn to bi-Maxwellian (in $\ensuremath{\alpha}$ mode) Maxwellian-type $\ensuremath{\gamma}$ mode), along with significant drop effective temperature. It shown that this EDF evolution attributed collisional collisionless property (but not stochastic heating) of low-energy electrons as well $\ensuremath{\alpha}\ensuremath{-}\ensuremath{\gamma}$ transition.
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