Analytics-statistics mixed training and its fitness to semisupervised manufacturing.
作者： Parag Parashar , Chun Han Chen , Chandni Akbar , Sze Ming Fu , Tejender S. Rawat
DOI: 10.1371/JOURNAL.PONE.0220607
关键词: Process (engineering) 、 Machine learning 、 Semiconductor device fabrication 、 Physical model 、 Scheme (programming language) 、 Artificial intelligence 、 Analytics 、 Artificial neural network 、 Computer science 、 Statistical model
摘要: While there have been many studies using machine learning (ML) algorithms to predict process outcomes and device performance in semiconductor manufacturing, the extensively …
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