Study on ferroelectric thin films for application to NDRO non-volatile memories
作者： Yuichi Nakao , Takashi Nakamura , Akira Kamisawa , Hidemi Takasu
DOI: 10.1080/10584589508019351
关键词: Polarization (electrochemistry) 、 Materials science 、 Electrode 、 Ferroelectricity 、 Ferroelectric thin films 、 Sputter deposition 、 Voltage 、 Capacitor 、 Thin film 、 Optoelectronics
摘要: Abstract In this paper we describe an experimental study on ferroelectric non-volatile memory. The test devices using a MFMIS (metal-ferroelectric-metal-insulator-semiconductor) structure were developed for 1-Tr-type NDRO (non-destructive readout) PZT (Lead-zirconate-titanate) and PT (lead-titanate) thin films deposited various bottom electrodes by solgel method. As electrodes, Pt, Pt/Ti, Pt/Ti/Ta Pt/IrO2 RF magnetron sputtering. We found out that variation in the caused drastic changes C-V characteristics fatigue of capacitors. I-V Pt/PZT/ Pt/SiO2/p-Si FET showed hysteresis loop direction corresponded to polarization film. A 2.7 V memory window was achieved 6 programming voltage. no after 1012 switching cycles.
sci-hub.se 参考文章(6)
Katsumi Sameshima, Takashi Nakamura, Kazuhiro Hoshiba, Yuichi Nakao, Akira Kamisawa, Tsutomu Atsuki, Nobuyuki Soyama, Katsumi Ogi, Preparation of Pb(Zr, Ti)O3Films on Pt/Ti/Ta Electrodes by Sol-Gel Process Japanese Journal of Applied Physics. ,vol. 32, pp. 4144- 4146 ,(1993) , 10.1143/JJAP.32.4144
M. Okuyama, T. Ueda, Y. Hamakawa, Preparation of Oriented PbTiO3Ferroelectric Thin Films on Silicon Japanese Journal of Applied Physics. ,vol. 24, pp. 619- ,(1985) , 10.7567/JJAPS.24S2.619
Shogo Matsubara, Sadahiko Miura, Yoichi Miyasaka, Nobuaki Shohata, Preparation of epitaxial ABO3perovskite‐type oxide thin films on a (100)MgAl2O4/Si substrate Journal of Applied Physics. ,vol. 66, pp. 5826- 5832 ,(1989) , 10.1063/1.343654
S. Y. Wu, Memory retention and switching behavior of metal-ferroelectric-semiconductor transistors Ferroelectrics. ,vol. 11, pp. 379- 383 ,(1976) , 10.1080/00150197608236584
W.H. Shepherd, Fatigue and Aging in Sol-Gel Derived PZT Thin Films MRS Proceedings. ,vol. 200, pp. 277- ,(1990) , 10.1557/PROC-200-277
A Quye, S Charters, Richard P Evershed, Mat Res Soc Symp Proc Cambridge University Press. ,(1995)